Cleanroom facility



AFM

Air shower

ALD and analysis systems

ALD systems

Annealing furnace

Bruker Stepper

Ellipsometry system

Entrance

Furnace

Interconnection station

JEOL JBX-6300FS

Kurt J.Lesker NANO36

NXQ Mask aligner

Obducat NIL system

Olympus SZ51

Optical platform

PVD systems

RF prober

RIE system

RTP systems

STS ICP

Wet benches

XRD instrument

ZEISS Axio Scope

ZEISS SIGMA HD SEM